Carbon nanotube structure and method of vertically aligning...

Details Carbon nanotube structure and method of vertically aligning... Carbon nanotube structure and method of vertically aligning...

2008-05-13

2008-05-13

Lindsay, Jr., Walter (Department: 2812)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

C257SE51040, C257SE51039, C257SE23074, C438S082000, C438S099000, C977S700000, C977S742000, C977S788000, C977S842000

Reexamination Certificate

active

11455192

ABSTRACT:
A Carbon NanoTube (CNT) structure includes a substrate, a CNT support layer, and a plurality of CNTs. The CNT support layer is stacked on the substrate and has pores therein. One end of each of the CNTs is attached to portions of the substrate exposed through the pores and each of the CNTs has its lateral sides supported by the CNT support layer. A method of vertically aligning CNTs includes: forming a first conductive substrate; stacking a CNT support layer having pores on the first conductive substrate; and attaching one end of the each of the CNTs to portions of the first conductive substrate exposed through the pores.

REFERENCES:
patent: 2003/0143398 (2003-07-01), Ohki et al.
patent: 2004/0150100 (2004-08-01), Dubin et al.
patent: 2005/0282925 (2005-12-01), Schlenoff et al.
patent: 2007/0048181 (2007-03-01), Chang et al.

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