Carbon nanotube gas sensor and method of manufacturing the same

Details Carbon nanotube gas sensor and method of manufacturing the same Carbon nanotube gas sensor and method of manufacturing the same

2007-05-08

2011-11-08

Olsen, Kaj K (Department: 1724)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S400000, C977S742000, C977S743000, C977S953000, C977S957000, C422S083000, C422S094000

Reexamination Certificate

active

08052855

ABSTRACT:
A carbon nanotube (“CNT”) gas sensor includes a substrate, an insulating layer formed on the substrate, electrodes formed on the insulating layer, and CNT barriers that protrude higher than the electrodes in spaces between the electrodes to form gas detecting spaces. A method of manufacturing the gas sensor includes forming an insulating layer on a substrate, forming an electrode pattern on the insulating layer, coating CNT paste having a thickness greater than a thickness of electrodes in the electrode pattern on the electrodes and the insulating layer, and patterning and firing the carbon nanotube paste, including using a photolithography method, to retain only portions of the CNT paste coated on spaces between the electrodes.

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Machine translation of Luyken et al., DE10118200A1, 2002.

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