Capacitor with zirconium oxide and method for fabricating...

Details Capacitor with zirconium oxide and method for fabricating... Capacitor with zirconium oxide and method for fabricating...

2009-10-28

2011-12-27

Pham, Thanhha (Department: 2894)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S304000, C257S311000, C257SE27086

Reexamination Certificate

active

08084804

ABSTRACT:
A capacitor with zirconium oxide and a method for fabricating the same are provided. The method includes: forming a storage node; forming a multi-layered dielectric structure on the storage node, the multi-layered dielectric structure including a zirconium oxide (ZrO2) layer and an aluminum oxide (Al2O3) layer; and forming a plate electrode on the multi-layered dielectric structure.

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