Capacitor with nano-composite dielectric layer and method...

Details Capacitor with nano-composite dielectric layer and method... Capacitor with nano-composite dielectric layer and method...

2005-12-30

2008-11-04

Lindsay, Jr., Walter (Department: 2812)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

C438S761000, C257SE51001, C977S700000, C977S902000

Reexamination Certificate

active

07446053

ABSTRACT:
A capacitor with a nano-composite dielectric layer and a method for fabricating the same are provided. A dielectric layer of a capacitor includes a nano-composite layer formed by mixing X number of different sub-layers, X being a positive integer greater than approximately 1. A method for forming a dielectric layer of a capacitor includes: forming a nano-composite layer by mixing X number of different sub-layers in the form of a nano-composition, X being a positive integer greater than approximately 1; and densifying the nano-composite layer.

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