Capacitor with insulating nanostructure

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C438S306000, C438S313000, C977S720000, C977S721000, C977S723000

Reexamination Certificate

active

10739688

ABSTRACT:
The present invention discloses a method including providing a substrate; forming a lower conductor over the substrate; forming a conducting nanostructure over the lower conductor; forming a thin dielectric over the conducting nanostructure; and forming an upper conductor over the thin dielectric. The present invention further discloses a device including a substrate; a lower conductor located over the substrate; a conducting nanostructure located over the lower conductor; a thin dielectric located over the conducting nanostructure; and an upper conductor located over the thin dielectric.

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patent: 2002/0000593 (2002-01-01), Nishiyama et al.
patent: 2003/0118738 (2003-06-01), Shuy et al.
patent: 2003/0171257 (2003-09-01), Stirbl et al.

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