Capacitor of semiconductor memory device and method of...

Details Capacitor of semiconductor memory device and method of... Capacitor of semiconductor memory device and method of...

2005-08-30

2005-08-30

Flynn, Nathan J. (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S301000, C257S310000

Reexamination Certificate

active

06936880

ABSTRACT:
A capacitor and a method of manufacturing the same are disclosed. The BST dielectric film is disposed between the lower electrode by coating a sidewall of the upper electrode and then forming the lower electrode in a second contact hole defined by the upper electrode and BST film. As such, degradation in the step coverage characteristic caused by forming a BST dielectric film having a desired composition ratio is avoided.

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