Capacitor of a semiconductor device having increased effective a

Details Capacitor of a semiconductor device having increased effective a Capacitor of a semiconductor device having increased effective a

1992-12-18

1995-08-15

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 60, 437919, H01L 2170, H01L 2700

Patent

active

054419085

ABSTRACT:
A semiconductor memory device includes a plurality of memory cells each having a single transistor and a single capacitor on a semiconductor substrate. The capacitor has a storage electrode with an externally communicated box-type tunnel in its center, one portion of the storage electrode being connected to the source region of the transistor. A method for manufacturing the semiconductor memory device is also provided. Thus, storage capacity is raised by increasing the effective area of the capacitor, and the planarizing effect is also excellent.

REFERENCES:
patent: 5028990 (1991-07-01), Kotaki et al.
patent: 5049957 (1991-09-01), Inoue et al.
patent: 5068698 (1991-11-01), Koyama
patent: 5234857 (1993-08-01), Kim et al.
patent: 5321649 (1994-06-01), Lee et al.
3-Dimensional stacked capacitor cell for 16 M and 64 M DRAMS, Ema et al, 592-IEDM, 1988.

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