Capacitor including a dielectric layer having an...

Details Capacitor including a dielectric layer having an... Capacitor including a dielectric layer having an...

2006-02-21

2006-02-21

Thomas, Eric W. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S311000, C257S310000

Reexamination Certificate

active

07002788

ABSTRACT:
In a capacitor, and a method of fabricating the same, the capacitor includes a lower electrode, a dielectric layer on the lower electrode, and an upper electrode on the dielectric layer, wherein the dielectric layer includes a lower dielectric region contacting the lower electrode, an upper dielectric region contacting the upper electrode, and at least one middle dielectric region between the lower dielectric region and the upper dielectric region, the at least one middle dielectric region having a less crystalline region than both the lower dielectric region and the upper dielectric region.

REFERENCES:
patent: 6436777 (2002-08-01), Ota
patent: 6528328 (2003-03-01), Aggarwal et al.
patent: 2002/0153579 (2002-10-01), Yamamoto
patent: 2003/0017266 (2003-01-01), Basceri et al.
patent: 2003/0038311 (2003-02-01), Basceri
patent: 2003/0104667 (2003-06-01), Basceri

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