Capacitor having a barrier layer made of a transition metal...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S308000

Reexamination Certificate

active

07122856

ABSTRACT:
The capacitor has a capacitor dielectric formed, in particular, as a high-□-dielectrical or ferroelectrical layer. A barrier layer is formed of a compound of a transition element with phosphorus, sulfur or arsenic. The barrier layer is underneath the capacitor dielectric. The barrier layer is oxygen-impermeable and thus prevents the oxidation of deep structures during high-temperature processes, in particular during the production of the capacitor dielectric.

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