Capacitor apparatus and method of manufacture of same

Details Capacitor apparatus and method of manufacture of same Capacitor apparatus and method of manufacture of same

1994-08-04

1997-07-08

Duda, Kathleen

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430311, 430318, 430329, 430330, G03F 700

Patent

active

056459769

ABSTRACT:
A method for fabricating a semiconductor capacitor having superior sidewall linearity and high capacitance in a small area wherein a titanate or tantalum barrier metal platform is deposited on the insulation layer of the semi conductor substrate. A capacitor structure comprising a first electrode layer of platinum or palladium, a dielectric layer preferably of a ferroelectric having a perovskite structure, and a second metal electrode layer is then constructed by sequential deposition of said layers. The subsequently deposited electrode metal of platinum or palladium will adhere to said barrier metal but delaminate from said insulation layer during high temperature cycling, yielding a high capacitance, small surface area structure.

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