Capacitive micromachined ultrasonic transducer

Details Capacitive micromachined ultrasonic transducer Capacitive micromachined ultrasonic transducer

2006-11-30

2010-06-01

Benson, Walter (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S311000

Reexamination Certificate

active

07728490

ABSTRACT:
A capacitive micromachined ultrasonic transducer having an ultrasonic wave transmission/reception surface formed by arranging a plurality of transducer cells each of which includes a membrane having a first electrode and a supporting film for supporting the first electrode, and also includes a second electrode arranged being opposite to the first electrode and being spaced apart from the first electrode at a prescribed interval, wherein: the transducer cells are arranged on the basis of resonant frequencies of the transducer cells.

REFERENCES:
patent: 5287331 (1994-02-01), Schindel et al.
patent: 7275298 (2007-10-01), Schindel
patent: 2005/0075572 (2005-04-01), Mills et al.
patent: 2005/0146247 (2005-07-01), Fisher et al.
patent: 2006/0170014 (2006-08-01), Smith et al.
patent: 63-237700 (1988-10-01), None
patent: 07-107595 (1995-04-01), None
patent: 08-080300 (1996-03-01), None
patent: 2003-299195 (2003-10-01), None
patent: 3478874 (2003-10-01), None
patent: WO 03/035281 (2003-05-01), None
Igal Ladabaum et al., “Surface Mircomachined Capacitive Ultrasonic Transducers”, IEEE Transaction on Ultrasonics, Ferroelectrics, Anifrequencv Controm, May 1998, vol. 45,No. 3, pp. 678to 690.

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