Capacitance type dynamical quantity sensor

Details Capacitance type dynamical quantity sensor Capacitance type dynamical quantity sensor

2005-06-21

2005-06-21

Nelms, David (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C257S414000, C257S415000

Reexamination Certificate

active

06909158

ABSTRACT:
A capacitance type dynamical quantity sensor includes a semiconductor substrate, a weight portion being displaced in accordance with a dynamical quantity, a movable electrode integrated with the weight portion, and a fixed electrode facing the movable electrode. The movable electrode and the fixed electrode provide a capacitor having a capacitance. The movable electrode is movable in accordance with the dynamical quantity. The capacitance of capacitor is changed in accordance with a displacement of the movable electrode so that the dynamical quantity as the capacitance change is measured with an outer circuit. The facing surface of the movable electrode facing the fixed electrode has a substantially rectangular shape, and an aspect ratio of the facing surface is in a range between 0.1 and 10.

REFERENCES:
patent: 5126812 (1992-06-01), Greiff
patent: 6151966 (2000-11-01), Sakai et al.

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