Capacitance dual electrode pressure sensor in a diffusion...

Details Capacitance dual electrode pressure sensor in a diffusion... Capacitance dual electrode pressure sensor in a diffusion...

2006-08-23

2008-11-11

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S724000

Reexamination Certificate

active

07448276

ABSTRACT:
A diffusion bonded space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The disclosure includes an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. A capacitive dual electrode pressure sensor which is integrated into a multilayered substrate is described. The pressure sensor may be used as a gage relative to atmospheric pressure if desired for a particular application.

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