Capacitance device including a perovskite film having (001)...

Details Capacitance device including a perovskite film having (001)... Capacitance device including a perovskite film having (001)...

2008-03-04

2008-03-04

Jackson, Jerome (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C361S311000, C257S347000, C257S288000

Reexamination Certificate

active

11063731

ABSTRACT:
A capacitance device including a substrate having a (111) orientation, an epitaxial film formed on the substrate and having a perovskite structure and a (001) orientation, and an electrode formed on the epitaxial film. The present invention may comprise devices having various functions, such as a ferroelectric random access memory, a SAW filter, or a ferroelectric actuator.

REFERENCES:
patent: 5650362 (1997-07-01), Nashimoto et al.
patent: 5985404 (1999-11-01), Yano et al.
patent: 6096434 (2000-08-01), Yano et al.
patent: 6278138 (2001-08-01), Suzuki
patent: 2002/0155667 (2002-10-01), Higuchi et al.
patent: 2004/0084994 (2004-05-01), Iwashita et al.
patent: 10-107216 (1998-04-01), None
patent: 10-120494 (1998-05-01), None

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