Radiant energy – Inspection of solids or liquids by charged particles
Patent
1992-04-21
1994-05-31
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
369126, H01J 3726, H01L 4122
Patent
active
053171527
ABSTRACT:
A cantilever type probe comprises a cantilever-shaped displacement element and a tip which displacement element has a first electrode layer, a first piezoelectric material film and a second piezoelectric material film which films are laminated on opposite sides of the first electrode layer, and a second electrode layer and a third electrode layer which layer are laminated on outer surfaces of the piezoelectric material films, and which tip is connected with a leader electrode located at a free end of the surface of the displacement element; wherein in the width direction of the cantilever both ends of the first electrode layer protrude outward more than each end of the second and third electrode layers. A scanning tunneling microscope comprises the cantilever type probe, a driving means for displacing the probe, a stage for specimen so as to approach and locate the specimen to the tip, and a potential applying means for applying a bias voltage between the tip and the specimen. An information processing apparatus further comprises a second potential applying means for applying a pulse and bias voltage between the tip and the recording medium; wherein an information is written on the recording medium and an information in the recording medium is read out by electric current flowing between the tip and the recording medium.
REFERENCES:
patent: 4894538 (1990-01-01), Iwatsuki et al.
patent: 4912822 (1990-04-01), Zdeblick et al.
patent: 4998016 (1991-03-01), Nose et al.
"Microfabrication of integrated scanning tunneling microscope" by Thomas R. Albrecht et al.: Journal of Vacuum Science & Technology, Second. Series vol. 8, No. 1; Jan./Feb. 1990; pp. 317-318.
Hirai Yutaka
Kasanuki Yuji
Nakayama Masaru
Shimada Yasuhiro
Takamatsu Osamu
Berman Jack I.
Beyer James
Canon Kabushiki Kaisha
LandOfFree
Cantilever type probe, and scanning tunnel microscope and inform does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Cantilever type probe, and scanning tunnel microscope and inform, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cantilever type probe, and scanning tunnel microscope and inform will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1629230