Cantilever type displacement element, and scanning tunneling mic

Details Cantilever type displacement element, and scanning tunneling mic Cantilever type displacement element, and scanning tunneling mic

1992-06-09

1994-10-18

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

369126, H01J 3726

Patent

active

053571088

ABSTRACT:
A cantilever type displacement element comprises a piezoelectric layer and at least two electrodes for applying a voltage to said piezoelectric layer, at least one of said electrodes being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.

REFERENCES:
patent: 4628330 (1986-12-01), Suga
patent: 4638206 (1987-01-01), Tsunooka et al.
patent: 4672496 (1987-06-01), Kanai et al.
patent: 4906840 (1990-03-01), Zdeblick
patent: 4998016 (1991-03-01), Nose et al.
patent: 5117148 (1992-05-01), Nakamura et al.
patent: 5126615 (1992-06-01), Takeuchi et al.
"Silicon as a Mechanical Material" by Kurt E. Petersen, Processing of IEEE, vol. 70, No. 5, May 1992; pp. 420-457.
"Microfabrication of integrated scanning tunneling microscope" by T. R. Albrech et al. Journal of Vacuum Science & Technology A; Second Series vol. 8, No. 1 Jan./Feb. 1990 pp. 317-318.
"New scanning tunneling microscopy tip for measuring surface topography" by Y. Akama et al. Journal of Vacuum Science & Technology A; Second Series vol. 8, No. 1 Jan./Feb. 1990 pp. 429-433.
"Etching of silicon (111) with the scanning tunneling microscope" by E. E. Ehrichs et al.; Journal of Vacuum Science & Technology A Second Series; vol. 1 Jan./Feb. 1990, pp. 571-573.
"Physical properties of thin-film filed emission cathodes with molybdenum cones" by C. A. Spindt et al.; Journal of Applied Physics vol. 47, No. 12 Dec. 1976; pp. 5248-5263.
"Microfabrication of Integrated Scanning Tunneling Microscope", Department of Applied Physics, Albrecht et al. (Jul. 10, 1989).
"Liquid-Jet Head", Patent Abstracts of Japan, Publ. No. JP3292147, (Dec. 12, 1991).
"Microfabricated Microscope Assembly", Publ. No. WO90/15986, Zdeblick et al., (Dec. 27, 1990).
"An Integrated Mass Storage Device", Publ. No. WO89/07256, Albrecht et al., (Aug. 10, 1989).

Affiliated with

Also associated with

Rating

Cantilever type displacement element, and scanning tunneling mic does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Cantilever type displacement element, and scanning tunneling mic, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cantilever type displacement element, and scanning tunneling mic will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2374464