Cantilever probe and apparatus using the same

Details Cantilever probe and apparatus using the same Cantilever probe and apparatus using the same

1994-06-03

1996-04-09

Levy, Stuart S.

Dynamic information storage or retrieval

Specific detail of information handling portion of system

Electrical modification or sensing of storage medium

250306, G11B 900

Patent

active

055068294

ABSTRACT:
A cantilever probe comprising a cantilever displacement element containing a piezoelectric material provided between driving electrodes for causing displacement of the piezoelectric material, a probe for information input and output provided on the free end of the element, a drawing electrode for the probe and, a non-electroconductive thin film provided on at least a portion of an end of the element.

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patent: 5036490 (1991-07-01), Kajimura et al.
patent: 5053995 (1991-10-01), Kajimura et al.
E. E. Ehrichs, et al., "Etching of Silicon (111) With the Scanning Tunneling Microscope", Journal of Vacuum Science & Technology A, Second Series, vol. 8, No. 1, pp. 571-573 (Jan./Feb. 1990).
Kurt E. Petersen, "Dynamic Micromechanics on Silicon: Techniques and Devices", IEEE Transactions of Electron Devices, vol. ED-25, No. 10, pp. 1241-1250 (Oct. 1978).
Thomas R. Albrecht, et al., "Microfabrication of Integrated Scanning Tunneling Microscope", Journal of Vacuum Science & Technology A, Second Series, vol. 8, No. 1, pp. 317-318 (Jan./Feb. 1990).
Kurt E. Petersen, "Silicon as a Mechanical Material", Proceedings of the IEEE, vol. 70, No. 5, pp. 420-457 (May 1982).

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