Cantilever holder and scanning probe microscope

Details Cantilever holder and scanning probe microscope Cantilever holder and scanning probe microscope

2008-05-20

2008-05-20

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S309000, C073S105000

Reexamination Certificate

active

07375322

ABSTRACT:
To prevent an influence from effecting on an oscillating state of a cantilever by firmly fixing a main body portion, there is provided a cantilever holder for attachably and detachably fixing a cantilever which is provided with a stylus at a front end thereof and a base end side of which is supported by a main body portion in a single-supported state, the cantilever holder including a base member having a mounting portion for mounting the main body portion in a state of being positioned at a predetermined position, a holding member made to be able to be brought into contact with at least a surface of the main body portion in a state of mounting the main body portion on the mounting portion and extended in a direction substantially orthogonal to a longitudinal direction (axis line A direction) of the cantilever, and pressing means for pressing both ends of the holding member to the base member by a predetermined pressure, fixing the main body portion to the mounting portion by way of the holding member and capable of separating the holding member from the surface of the main body portion by releasing depression, in which the holding member is formed by a resin species material.

REFERENCES:
patent: 6941798 (2005-09-01), Yamaoka et al.
patent: 7026607 (2006-04-01), Kitajima et al.
patent: 7170054 (2007-01-01), Iyoki et al.

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