Cantilever for a scanning probe microscope and a method of manuf

Details Cantilever for a scanning probe microscope and a method of manuf Cantilever for a scanning probe microscope and a method of manuf

1991-07-01

1993-12-28

Raevis, Robert

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528

Patent

active

052729133

ABSTRACT:
A cantilever for a scanning probe microscope comprises a lever section and a probe section disposed near the free end thereof. The probe section includes a conical distal end portion having a narrow point angle and a bulging proximal end portion continuous with the distal end portion. The cantilever is manufactured by utilizing a semiconductor process.

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"Microfabrication of Cantilever Styli for the Atomic Force Microscope"; J. Vac. Sci. Technol. A8(4), Jul./Aug. 1990; pp. 3386-3396.
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