Cantilever chip for scanning probe microscope

Details Cantilever chip for scanning probe microscope Cantilever chip for scanning probe microscope

1993-01-12

1994-11-22

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250423F, H01J 3700

Patent

active

053671651

ABSTRACT:
A cantilever chip has a holding substrate, and a cantilever having the shape of a hollow triangle extends from the holding substrate. A probe is arranged at the distal end portion of the cantilever. An axis of the probe is inclined at a predetermined angle with respect to a normal extending from the surface of the cantilever. This angle is set such that the axis of the probe is perpendicular to a sample surface when the cantilever chip is mounted on an atomic force microscope.

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patent: 5245187 (1993-09-01), Kawase et al.
patent: 5264696 (1993-11-01), Toda
Atomic Resolution Imaging of A Nonconductor by Atomic Force Microscopy; J. Appl. Phys. 62(7), Oct. 1, 1987; pp. 2599-2602; Albrecht et al.
Microfabrication of Cantilever Sytli for The Atomic Force Microscope; J. Vac. Scl. Technol. A 8(4); Jul./Aug. 1990; pp. 3386-3396; Albrecht et al.

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