Cantilever chip

Details Cantilever chip Cantilever chip

1997-03-03

1998-05-19

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

73105, H01J 3728

Patent

active

057539120

ABSTRACT:
A cantilever chip comprises a support section having a support face and an attachment face opposed to the support face, a cantilever supported on the support face of the support section, and a probe provided on a free-end portion of the cantilever. The width of the support face of the support section is less than the width of the attachment face such that a pointed end portion of the probe may scan a desired portion of a sample without influence due to the shape of a surface of the sample. First and second inclined faces extending in the longitudinal direction of the cantilever are formed between the support face and the attachment face.

REFERENCES:
patent: Re33387 (1990-10-01), Binnig
patent: 5021364 (1991-06-01), Akamine et al.
patent: 5051379 (1991-09-01), Bayer et al.
patent: 5239863 (1993-08-01), Kado et al.
patent: 5367165 (1994-11-01), Toda et al.
S. Akamine et al; "Improved Atomic Force Microscope Images Using Microcantilevers With Sharp Tips"; pp. 316-318; Appl. Phys. Lett. 57 (3); Jul. 16, 1990.
T.R. Albrecht et al; "Microfabrication of Cantilever Styli for the Atomic Force Microscope"; pp. 3386-3396; J. Vac. Sci. Technol. A8 (4); Jul./Aug., 1990.
T.R. Albrecht et al; "Atomic Resolution Imaging of a Nonconductor By Atomic Force Microscopy"; pp. 2599-2602; J. Appl. Phys. 62 (7), Oct. 1, 1987.

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