Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2006-06-19
2008-08-12
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C250S310000, C073S105000, C073S584000
Reexamination Certificate
active
07411189
ABSTRACT:
A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.
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Oblon & Spivak, McClelland, Maier & Neustadt P.C.
The Foundation for the Promotion of Industrial Science
Wells Nikita
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