Cantilever array, method for fabricating the same, scanning...

Radiant energy – Inspection of solids or liquids by charged particles

Reexamination Certificate

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C250S307000, C250S310000, C073S105000, C204S157740

Reexamination Certificate

active

11454989

ABSTRACT:
A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.

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U.S. Appl. No. 11/454,989, filed Jun. 19, 2006, Kawakatsu.
U.S. Appl. No. 11/454,986, filed Jun. 19, 2006, Kawakatsu.
U.S. Appl. No. 11/454,987, filed Jun. 19, 2006, Kawakatsu.

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