Cantilever array and scanning probe microscope including a...

Details Cantilever array and scanning probe microscope including a... Cantilever array and scanning probe microscope including a...

2007-05-22

2007-05-22

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C073S584000, C073S105000

Reexamination Certificate

active

10481443

ABSTRACT:
There are provided a cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers.The cantilever array includes a large number of compliant cantilevers (3) sliding on a surface (2) of a sample (1).

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U.S. Appl. No. 10/567,904, filed Feb. 10, 2006, Kobayashi et al.
U.S. Appl. No. 10/564,447, filed Jan. 12, 2006, Kobayashi et al.

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