Cammed nut for ceramics fastening

Details Cammed nut for ceramics fastening Cammed nut for ceramics fastening

1996-03-29

1999-03-23

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429831, 156345, 118715, 118723E, 118728, 2952502, C23C 1434, C23C 1600, C23F 102, B23P 1100

Patent

active

058854231

ABSTRACT:
In a vacuum processing chamber, a method and apparatus for securing an article to a ceramic plate comprises forming a bore in the ceramic plate, forming a counterbore in the ceramic plate, the counterbore having a center which is offset from a center of the bore, inserting a nut into the counterbore, the nut having a threaded hole therein which is offset from the center of the nut to the same degree that the center of the bore is offset from the center of the counterbore, securing the article to the ceramic plate with a screw which is received into the threaded hole of the nut, and fixing an insulating plug having an outer diameter substantially equal to the diameter of the counterbore in the counterbore adjacent to the nut.

REFERENCES:
patent: 4340462 (1982-07-01), Koch
patent: 4891087 (1990-01-01), Davis et al.
patent: 4948458 (1990-08-01), Ogle
patent: 5200232 (1993-04-01), Tappan et al.
patent: 5262029 (1993-11-01), Erskine et al.
patent: 5332443 (1994-07-01), Chew et al.
patent: 5350479 (1994-09-01), Collins et al.

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