Cam-based arrangement for positioning confinement rings in a pla

Details Cam-based arrangement for positioning confinement rings in a pla Cam-based arrangement for positioning confinement rings in a pla

1998-06-24

2000-02-01

Breneman, Bruce

Coating apparatus

Gas or vapor deposition

With treating means

156345, C30C 200

Patent

active

060190604

ABSTRACT:
A cam-based arrangement configured to move a confinement ring along a first axis of a plasma processing chamber. The confinement ring is disposed in a plane that is orthogonal to the first axis. The cam-based arrangement includes a cam ring having a plurality of cam regions formed on a first surface of the cam ring. There is further included a plurality of cam followers in rolling contact with the first surface of the cam ring. There is also included a plurality of plungers oriented parallel to the first axis, each of the plurality of plungers being coupled to one of the plurality of cam followers and to the confinement ring, wherein the plurality of plungers move in an orchestrated manner parallel to the first axis as the cam ring is rotated and the plurality of cam followers stay in the rolling contact with the first surface of the cam ring.

REFERENCES:
patent: 5534751 (1996-07-01), Lenz et al.

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