Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2004-12-08
2008-11-18
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C250S310000, C250S492200, C250S492300
Reexamination Certificate
active
07453063
ABSTRACT:
A calibration substrate for use during calibration of a lithographic apparatus is disclosed. The calibration substrate includes a first substantially flat surface, a second substantially flat surface that is substantially parallel to the first surface, and an edge that connects the first surface to the second surface. The calibration substrate has a thermal expansion coefficient of less than about 1.0×10−6K−1to reduce deformation thereof due to thermal changes in the substrate while in the lithographic apparatus.
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patent: 6262796 (2001-07-01), Loopstra et al.
patent: 6710849 (2004-03-01), Kwan et al.
patent: 2007/0058152 (2007-03-01), Zaal et al.
De Jong Frederick Eduard
Goorman Koen
Menchtchikov Boris
Mertens Jeroen Johannes Sophia Maria
Ottens Joost Jeroen
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Wells Nikita
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