Calibration standard for 2-D and 3-D profilometry in the sub-nan

Details Calibration standard for 2-D and 3-D profilometry in the sub-nan Calibration standard for 2-D and 3-D profilometry in the sub-nan

1995-06-07

1997-09-09

Williams, Hezron E.

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 520

Patent

active

056659059

ABSTRACT:
A method for measuring the width of a tip in an Atomic Force Microscope/Scanning Tunneling Microscope using a calibration standard is provided. The method incorporates the steps of providing a tip, measuring the width b1 of a first kind of structure, and measuring the width b2 of a second kind of structure. The steps of measuring comprise the steps of profiling the first and second kinds of structures with a tip and calculating the width of the tip as a function of the measured widths b1 and b2. The calibration standard comprises the first and second kinds of structures and may be, for example, a trench and a raised line which have substantially the same width.

REFERENCES:
patent: 5116462 (1992-05-01), Bartha et al.
patent: 5186041 (1993-02-01), Nyyssonen
patent: 5242541 (1993-09-01), Bayer et al.
patent: 5347854 (1994-09-01), Martin et al.
patent: 5382795 (1995-01-01), Bayer et al.
patent: 5578745 (1996-11-01), Bayer et al.
patent: 5591903 (1997-01-01), Vesenka et al.
T. Ohmi et al., "Calibration of height in atomic force microscope images with subnanometer scale silicon dioxide steps", Appl. Phys. Lett., vol. 61, No. 20, pp. 2479-2481, 16 Nov. 1992.
M. Anders et al., "Potentiometry for thin-film structures using atomic force microscopy", J. of Vacuum Science & Technology, A8, No. 1, pp. 394-399, Jan./Feb. 1990.
G. A. Candela et al., "Film thickness and refractive index Standard Reference Material calibrated by ellipsometry and profilometry", SPIE, vol. 661, pp. 402-407, Optical Testing and Metrology (1986).
Hatsuzawa et al., "Critical Dimension Measurements by Electron and Optical Beams for the Establishment of Linewidth Standards", Proc. IEEE 1992 Int. Conf. on Microelectronic Test Structures, vol. 5, pp. 180-184, Mar. 16-19, 1992.
Gehrtz et al., "Scanning tunneling microscopy of machined surfaces", J. Vac. Sci. Technol. A, vol. 6, No. 2, pp. 432-435, Mar./Apr. 1988.
H. Kunzmann, "Nanometrology at the PTB", Metrologia, vol. 28, pp. 443-453, 1991/1992.
Griffith et al., "Dimensional Methrology with Sconning Probe Microscopes", J. Appl. Phys., vol. 74, No. 9, 01 Nov. 1993, pp. R83-R109.
Keller et al., "Envelope Reconstruction of Probe Microscope Images", Surface Science, vol. 294, 1993, pp. 409-419.
Markiewicz et al., "Atomic Force Microscopy Probe Tip Visualization and Improvement of Images Using a Simple Deconvolution Procedure", Longmuir, vol. 10, No. 01, Oct. 1994, pp. 5-7.
Vesenka et al., "Colloidal Gold Particles as on Incompressible Atomic Force Microscope Imaging Standard For Assessing the Compressibility of Biomolecules", Biophysical Journal, vol. 65, Sep. 1993, pp. 992-997.
Vesenka et al., "Three-Dimensional Probe Reconstruction For Atomic Force Microscopy", Rev. Sci. Instrum., vol. 65, No. 07, Jul. 1994, pp. 2249-2251.
Martin et al., "Method For Imaging Sidewalls by Atomic Force Microscopy", Appl. Phys. Lett., vol. 64, No. 19, 09 May 1994, pp. 2498-2500.

Affiliated with

Also associated with

Rating

Calibration standard for 2-D and 3-D profilometry in the sub-nan does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Calibration standard for 2-D and 3-D profilometry in the sub-nan, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Calibration standard for 2-D and 3-D profilometry in the sub-nan will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-71587