Thermal measuring and testing – Thermal calibration system
Reexamination Certificate
2008-11-18
2011-11-01
Fulton, Christopher (Department: 2841)
Thermal measuring and testing
Thermal calibration system
C374S102000, C374S178000, C702S099000, C438S014000, C324S750020
Reexamination Certificate
active
08047706
ABSTRACT:
Methods and systems for calibrating a temperature control system in a vapor deposition chamber. A temperature sensor senses temperature within a semiconductor processing chamber and generates an output signal. A temperature control system controls a chamber temperature by controlling a heating apparatus based on the output signal. A method includes instructing the control system to target a setpoint temperature, and depositing a layer of material onto a surface in the chamber by a vapor deposition process. A variation of a property of the layer is measured while depositing the layer, the property known to vary cyclically as a thickness of the layer increases. The measured property is allowed to vary cyclically for one or more cycles. If there is a difference between a time period of one or more of the cycles and an expected time period associated with the setpoint temperature, the temperature control system is adjusted based on the difference.
REFERENCES:
patent: 4302731 (1981-11-01), Ashida
patent: 4316080 (1982-02-01), Wroblewski
patent: 4454483 (1984-06-01), Baylor
patent: 5326170 (1994-07-01), Moslehi et al.
patent: 6126744 (2000-10-01), Hawkins et al.
patent: 6179466 (2001-01-01), Peuse et al.
patent: 6207936 (2001-03-01), de Waard et al.
patent: 6596973 (2003-07-01), Donald et al.
patent: 6950774 (2005-09-01), Donald
patent: 7289865 (2007-10-01), Bauer
patent: 7368014 (2008-05-01), Doan
patent: 7572052 (2009-08-01), Ravi et al.
patent: 2004/0005147 (2004-01-01), Wang et al.
patent: 2009/0245320 (2009-10-01), Timans
patent: 2011/0076786 (2011-03-01), Ahmad et al.
Aggarwal Ravinder
Bartlett Gregory
Givens Michael
Goodman Matthew G.
Hawkins Mark
ASM America Inc.
Fulton Christopher
Knobbe Martens Olson & Bear LLP
LandOfFree
Calibration of temperature control system for semiconductor... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Calibration of temperature control system for semiconductor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Calibration of temperature control system for semiconductor... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4257979