Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Reexamination Certificate
2005-09-06
2005-09-06
Smith, Zandra V. (Department: 2877)
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
C356S237100, C356S445000, C356S630000, C250S559270
Reexamination Certificate
active
06940592
ABSTRACT:
Two more measurements are made on the same workpiece, during fabrication. Each measurement may be made employing a different process. The measurements are used together to determine a property of the workpiece. For example, multiple measurements from a first process are used with a predetermined value of the property of interest in a simulator to generate a simulated value of a signal to be measured in a second process. One or more such simulated values and a measured value are used to identify a value of the property of interest. When the workpiece's property is found to not match the specification, a process control parameter used in the workpiece's fabrication is adjusted, thereby to implement process control.
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Borden Peter G.
Li Jiping
Madsen Jon
Applied Materials Inc.
Silicon Valley Patent & Group LLP
Stock, Jr. Gordon J.
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