Cable actuated drive assembly for vacuum chamber

Details Cable actuated drive assembly for vacuum chamber Cable actuated drive assembly for vacuum chamber

1996-03-29

1998-08-18

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912143, 118728, 114939, 114935, B23K 1000

Patent

active

057960666

ABSTRACT:
In a vacuum processing chamber, a drive assembly for moving an article such as a substrate, clamp or pin lifter. The drive assembly includes at least one cable actuated assembly having a pin and housing mechanically coupled to a cable and sleeve, respectively, so that movement of the cable within the sleeve causes the pin to move within the housing. The other ends of the cable and sleeve are connected to a cable linkage box which is driven by an actuator to move the cable within the sleeve. A plurality of cable actuated assemblies can be attached to a substrate support at desired locations such that the pins extend through holes in the substrate support. The cables to which the pins are coupled can be simultaneously driven by the actuator to lift substrates off of the substrate support.

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