Fluid handling – With cleaner – lubrication added to fluid or liquid sealing... – Cleaning or steam sterilizing
Reexamination Certificate
2005-10-11
2005-10-11
Walton, George L. (Department: 3753)
Fluid handling
With cleaner, lubrication added to fluid or liquid sealing...
Cleaning or steam sterilizing
C134S001200, C134S001300, C134S022140, C134S022190, C134S102200, C134S16600C, C134S171000, C137S015040, C137S015050, C137S883000, C137S885000, C251S031000, C251S061100
Reexamination Certificate
active
06953047
ABSTRACT:
The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated.
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Birtcher Charles Michael
Martinez Martin Castaneda
Silva David James
Steidl Thomas Andrew
Vivanco Gil
Air Products and Chemicals Inc.
Chase Geoffrey L.
Walton George L.
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