C-axis oriented thin film ferroelectric transistor memory cell a

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257310, 257315, 257316, 257410, 257411, 365145, 365177, 36518526, H01L 29788

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active

060112859

ABSTRACT:
The structure of a c-axis FEM cell semiconductor includes a silicon substrate; a source junction region and a drain junction region located in the substrate; a gate junction region located between the source junction region and the drain junction region; a FEM gate unit including a lower electrode, a c-axis oriented Pb.sub.5 Ge.sub.3 O.sub.11 FE layer and an upper electrode; wherein the FEM gate unit is sized on the gate junction region such that any edge of said FEM gate unit is a distance "D" from the edges of the source junction region and the drain junction region; an insulating layer, having an upper surface, overlying the junction regions, the FEM gate unit and the substrate; and source, drain and gate electrodes.

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Peng et al., "Oriented Lead Germanate Thin Films by Excimer Laser Ablation", Appl. Phys. Lett. 60(7), Feb. 17, 1992, pp. 827-829.
Sinharoy et al., "Growth and the Microstructural and Ferroelectric Characterization of Oriented BaMgF.sub.4 Thin Films", IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 38, No. 6, Nov., 1991, pp. 663-667.
Nakao et al., "Study on Ferroelectric Thin Films for Application to NDRO Non-volatile Memories," Integrated Ferroelectrics, 1995, vol. 6, pp. 35-46.
Nakamura et al., "Preparation of Bi.sub.4 Ti.sub.3 O.sub.12 Films by MOCVD and Their Application to Memory Devices," Integrated Ferroelectrics, vol. 6, 1995, pp. 35-46.

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