Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2006-12-06
2008-11-18
Nguyen, Kiet T (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S492210
Reexamination Certificate
active
07453069
ABSTRACT:
An ion accelerating device includes a series of bushing units and a series of resistor circuit units. Each resistor circuit unit is coupled to one bushing unit. A bushing unit includes three integrated conductors to establish connections to the coupled resistor circuit unit and to an immediately adjacent bushing unit such that a voltage to the bushing unit may be degraded by the resistor circuit unit before reaching the lens and that two bushing units may contact one another directly.
REFERENCES:
patent: 5483077 (1996-01-01), Glavish
patent: 7112809 (2006-09-01), Rathmell et al.
Bell Edward W.
Buonodono James P.
Lubicki Piotr
Nguyen Kiet T
Varian Semiconductor Equipment Associates Inc.
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