Buried undercut mesa-like waveguide and method of making same

Details Buried undercut mesa-like waveguide and method of making same Buried undercut mesa-like waveguide and method of making same

1987-08-20

1988-08-16

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156647, 156649, 156652, 1566591, 156662, 357 16, 357 17, 357 30, 357 56, 372 45, 437126, 437129, 437228, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

047642467

ABSTRACT:
Epitaxial regrowth by vapor phase epitaxy of controlled composition semiconductor material in and around undercut regions of a processed heterostructure wafer permits formation of a ridge waveguide capable of active or passive operation. Subsequent material selective and crystallographically preferential etching is employed to form mirror facets on each end of the ridge waveguide.

REFERENCES:
patent: 3833435 (1974-09-01), Logan et al.
patent: 3883219 (1975-05-01), Logan et al.
patent: 4099305 (1978-07-01), Cho et al.
patent: 4285763 (1981-08-01), Coldren
patent: 4468850 (1984-09-01), Liau et al.
patent: 4662988 (1987-05-01), Renner
Japanese Journal of Applied Physics, vol. 22, No. 11, 1983, H. Burkhard et al., pp. L721-L723.
Japanese Journal of Applied Physics, vol. 21, No. 11, 1982, R. Blondeau et al., p. l655.
Applied Physics Letters, vol. 42, No. 5, 1983, U. Koren et al., pp. 403-405.
Applied Physics Letters, vol. 40, No. 7, 1982, Z. Liau et al., pp. 568-570.
IEEE Journal of Quantum Electronics, vol. QE-19, No. 5, 1983, T. Chen et al., pp. 783-785.
Journal of Applied Physics, vol. 54, No. 5, 1983, T. Chen et al., pp. 2407-2412.
Applied Physics Letters, vol. 38, No. 4, 1981, M. A. Bosch et al., pp. 264-266.
Journal of the Electrochemical Society, vol. 126, No. 2, 1979, S. B. Phatak, pp. 287-292.
Journal of the Electrochemical Society, vol. 123, No. 5, 1976, R. P. Tijburg et al., pp. 687-691.
Compound Semiconductors, vol. 1, 1963, J. W. Faust, Jr., pp. 445-468.
Applied Physics Letters, vol. 43, No. 5, 1983, A. Hasson et al., pp. 403-405.

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