Buried conductor patterns formed by surface transformation...

Details Buried conductor patterns formed by surface transformation... Buried conductor patterns formed by surface transformation...

2007-01-16

2007-01-16

Lee, Eugene (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Physical configuration of semiconductor

With electrical contact in hole in semiconductor

C257S041000, C257S044000

Reexamination Certificate

active

09940792

ABSTRACT:
A plurality of buried conductors and/or buried plate patterns formed within a monocrystalline substrate is disclosed. A plurality of empty-spaced buried patterns are formed by drilling holes in the monocrystalline substrate and annealing the monocrystalline substrate to form empty-spaced patterns of various geometries. The empty-spaced patterns are then connected through vias with surfaces of the monocrystalline substrate. The empty-spaced patterns and their respective vias are subsequently filled with conductive materials.

REFERENCES:
patent: 3497455 (1970-02-01), Ahr
patent: 4241359 (1980-12-01), Izumi et al.
patent: 4314595 (1982-02-01), Yamamoto et al.
patent: 4397075 (1983-08-01), Fatula et al.
patent: 4589928 (1986-05-01), Dalton
patent: 4661202 (1987-04-01), Ochii
patent: 4717681 (1988-01-01), Curran
patent: 4756956 (1988-07-01), Nagai et al.
patent: 4763179 (1988-08-01), Tsubouchi et al.
patent: 4962051 (1990-10-01), Liaw
patent: 4962058 (1990-10-01), Cronin et al.
patent: 4992321 (1991-02-01), Kandachi et al.
patent: 5055426 (1991-10-01), Manning
patent: 5098852 (1992-03-01), Niki et al.
patent: 5110754 (1992-05-01), Lowrey et al.
patent: 5112771 (1992-05-01), Ishii et al.
patent: 5160987 (1992-11-01), Pricer et al.
patent: 5176789 (1993-01-01), Yamazaki et al.
patent: 5250459 (1993-10-01), Lee
patent: 5291438 (1994-03-01), Witek et al.
patent: 5306942 (1994-04-01), Fujii
patent: 5404029 (1995-04-01), Husher et al.
patent: 5426061 (1995-06-01), Sopori
patent: 5443661 (1995-08-01), Oguro et al.
patent: 5449630 (1995-09-01), Lur et al.
patent: 5461243 (1995-10-01), Ek et al.
patent: 5471180 (1995-11-01), Brommer et al.
patent: 5510298 (1996-04-01), Redwine
patent: 5526449 (1996-06-01), Meade et al.
patent: 5527739 (1996-06-01), Parrillo et al.
patent: 5565697 (1996-10-01), Asakawa et al.
patent: 5583368 (1996-12-01), Kenney
patent: 5599745 (1997-02-01), Reinberg
patent: 5629226 (1997-05-01), Ohtsuki
patent: 5639684 (1997-06-01), Kwok
patent: 5646053 (1997-07-01), Schepis
patent: 5661044 (1997-08-01), Holland et al.
patent: 5662768 (1997-09-01), Rostoker
patent: 5679475 (1997-10-01), Yamagata et al.
patent: 5691230 (1997-11-01), Forbes
patent: 5739796 (1998-04-01), Jasper, Jr. et al.
patent: 5759898 (1998-06-01), Ek et al.
patent: 5773152 (1998-06-01), Okonogi
patent: 5789859 (1998-08-01), Watkins et al.
patent: 5798559 (1998-08-01), Bothra
patent: 5811870 (1998-09-01), Bhattacharyya et al.
patent: 5834824 (1998-11-01), Shepherd et al.
patent: 5840590 (1998-11-01), Myers, Jr. et al.
patent: 5858869 (1999-01-01), Chen et al.
patent: 5861340 (1999-01-01), Bai et al.
patent: 5866204 (1999-02-01), Robbie et al.
patent: 5879996 (1999-03-01), Forbes
patent: 5903041 (1999-05-01), La Fleur et al.
patent: 5920121 (1999-07-01), Forbes et al.
patent: 5943581 (1999-08-01), Lu et al.
patent: 5953625 (1999-09-01), Bang
patent: 5962910 (1999-10-01), Hawley et al.
patent: 5963817 (1999-10-01), Chu et al.
patent: 5963838 (1999-10-01), Yamamoto et al.
patent: 5969983 (1999-10-01), Thakur et al.
patent: 5973380 (1999-10-01), Cutter et al.
patent: 5994776 (1999-11-01), Fang et al.
patent: 5997378 (1999-12-01), Dynka et al.
patent: 5999308 (1999-12-01), Nelson et al.
patent: 6001711 (1999-12-01), Hashimoto
patent: 6013970 (2000-01-01), Nishiwaki et al.
patent: 6016000 (2000-01-01), Moslehi
patent: 6016001 (2000-01-01), Sanchez et al.
patent: 6022793 (2000-02-01), Wijaranakula et al.
patent: 6054808 (2000-04-01), Watkins et al.
patent: 6057224 (2000-05-01), Bothra
patent: 6069064 (2000-05-01), Cutter et al.
patent: 6075640 (2000-06-01), Nelson
patent: 6077792 (2000-06-01), Farrar
patent: 6083324 (2000-07-01), Henley et al.
patent: 6084814 (2000-07-01), Casper et al.
patent: 6088282 (2000-07-01), Loughmiller et al.
patent: 6090647 (2000-07-01), Grass
patent: 6093623 (2000-07-01), Forbes
patent: 6093624 (2000-07-01), Letavic et al.
patent: 6097077 (2000-08-01), Gordon et al.
patent: 6100176 (2000-08-01), Forbes et al.
patent: 6113758 (2000-09-01), De Nora et al.
patent: 6121126 (2000-09-01), Ahn et al.
patent: 6121659 (2000-09-01), Christensen et al.
patent: 6127777 (2000-10-01), Watkins et al.
patent: 6136666 (2000-10-01), So
patent: 6139626 (2000-10-01), Norris et al.
patent: 6146925 (2000-11-01), Dennison
patent: 6171923 (2001-01-01), Chi et al.
patent: 6172456 (2001-01-01), Cathey et al.
patent: 6174784 (2001-01-01), Forbes
patent: 6202065 (2001-03-01), Wills
patent: 6204145 (2001-03-01), Noble
patent: 6206065 (2001-03-01), Robbie et al.
patent: 6214686 (2001-04-01), Divakaruni et al.
patent: 6215158 (2001-04-01), Choi
patent: 6218693 (2001-04-01), Lu
patent: 6228694 (2001-05-01), Doyle et al.
patent: 6239187 (2001-05-01), Hatke et al.
patent: 6248422 (2001-06-01), Robbie et al.
patent: 6251751 (2001-06-01), Chu et al.
patent: 6252293 (2001-06-01), Seyyedy et al.
patent: 6255156 (2001-07-01), Forbes et al.
patent: 6261876 (2001-07-01), Crowder et al.
patent: 6271079 (2001-08-01), Wei et al.
patent: 6271566 (2001-08-01), Tsuchiaki
patent: 6274460 (2001-08-01), Delgado et al.
patent: 6277728 (2001-08-01), Ahn
patent: 6284675 (2001-09-01), Jin et al.
patent: 6288437 (2001-09-01), Forbes et al.
patent: 6291871 (2001-09-01), Dennison
patent: 6294420 (2001-09-01), Tsu et al.
patent: 6309950 (2001-10-01), Forbes
patent: 6315826 (2001-11-01), Muramatsu
patent: 6323536 (2001-11-01), Cutter et al.
patent: 6338805 (2002-01-01), Anderson
patent: 6339011 (2002-01-01), Gonzalez et al.
patent: 6344373 (2002-02-01), Bhattacharyya et al.
patent: 6351425 (2002-02-01), Porter
patent: 6368938 (2002-04-01), Usenko
patent: 6376336 (2002-04-01), Buynoski
patent: 6377070 (2002-04-01), Forbes
patent: 6383924 (2002-05-01), Farrar et al.
patent: 6387824 (2002-05-01), Aoi et al.
patent: 6391738 (2002-05-01), Moore
patent: 6423582 (2002-07-01), Fischer et al.
patent: 6423613 (2002-07-01), Geusic
patent: 6424001 (2002-07-01), Forbes et al.
patent: 6436187 (2002-08-01), Patel et al.
patent: 6437403 (2002-08-01), Noguchi
patent: 6444534 (2002-09-01), Maszara
patent: 6444558 (2002-09-01), Cutter et al.
patent: 6448601 (2002-09-01), Forbes et al.
patent: 6452713 (2002-09-01), White
patent: 6456149 (2002-09-01), Cutter et al.
patent: 6458630 (2002-10-01), Daubenspeck et al.
patent: 6461933 (2002-10-01), Houston
patent: 6478883 (2002-11-01), Tamatsuka et al.
patent: 6495395 (2002-12-01), Reinberg
patent: 6495454 (2002-12-01), Livengood et al.
patent: 6496034 (2002-12-01), Forbes et al.
patent: 6498056 (2002-12-01), Motsiff et al.
patent: 6509623 (2003-01-01), Zhao
patent: 6525399 (2003-02-01), Cutter et al.
patent: 6531727 (2003-03-01), Forbes et al.
patent: 6538330 (2003-03-01), Forbes
patent: 6541356 (2003-04-01), Fogel et al.
patent: 6541811 (2003-04-01), Thakur et al.
patent: 6542682 (2003-04-01), Cotteverte et al.
patent: 6559491 (2003-05-01), Forbes et al.
patent: 6566682 (2003-05-01), Forbes
patent: 6579738 (2003-06-01), Farrar et al.
patent: 6582512 (2003-06-01), Geusic et al.
patent: 6583437 (2003-06-01), Mizuno et al.
patent: 6589334 (2003-07-01), John et al.
patent: 6593625 (2003-07-01), Christiansen et al.
patent: 6597203 (2003-07-01), Forbes
patent: 6630713 (2003-10-01), Geusic
patent: 6630724 (2003-10-01), Marr
patent: 6649476 (2003-11-01), Forbes
patent: 6656822 (2003-12-01), Doyle et al.
patent: 6657277 (2003-12-01), Hsieh
patent: 6674667 (2004-01-01), Forbes
patent: 6740913 (2004-05-01), Doyle et al.
patent: 6898362 (2005-05-01), Forbes et al.
patent: 6929984 (2005-08-01), Forbes et al.
patent: 6943065 (2005-09-01), Bhattacharyya et al.
patent: 2003/0042534 (2001-08-01), Bhattacharyya
patent: 2002/0001965 (2002-01-01), Forbes
patent: 2002/0048968 (2002-04-01), Ahn
patent: 2002/0062782 (2002-05-01), Norris et al.
patent: 2002/0070419 (2002-06-01), Farrar et al.
patent: 2002/0070421 (2002-06-01), Ashburn
patent: 2002/0076896 (2002-06-01), Farrar et al.
patent: 2002/0079557 (2002-06-01), Ahn et al.
patent: 2002/0175330 (2002-11-01), Geusic et al.
patent: 2002/0182837 (2002-12-01), Daubenspeck et al.
patent: 2002/0185686 (2002-12-01), Christiansen et al.
patent: 2003/0027406 (2003-02-01), Malone
patent: 2003/004

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