Static information storage and retrieval – Systems using particular element – Semiconductive
Patent
1993-07-14
1995-07-04
Nguyen, Viet Q.
Static information storage and retrieval
Systems using particular element
Semiconductive
257302, 257377, 257368, 257321, H01L 2710, H01L 2978
Patent
active
054306736
ABSTRACT:
A ROM array comprises orthogal sets of buried bit lines and polysilicon wordlines. The buried bit lines comprise trenches with insulating material on the side walls, the trenches then being filled with polysilicon. Theis reduces bit line sheet resistance and increases the punch through voltage between adjacent bit lines.
REFERENCES:
patent: 4222062 (1980-09-01), Trotter et al.
patent: 4912535 (1990-03-01), Okumura
patent: 5017977 (1992-05-01), Richardson
patent: 5278438 (1994-01-01), Kim et al.
Hong Gary
Hsue Chen-Chiu
Nguyen Viet Q.
United Microelectronics Corp.
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