Buried bit line ROM with low bit line resistance

Static information storage and retrieval – Systems using particular element – Semiconductive

Patent

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Details

257302, 257377, 257368, 257321, H01L 2710, H01L 2978

Patent

active

054306736

ABSTRACT:
A ROM array comprises orthogal sets of buried bit lines and polysilicon wordlines. The buried bit lines comprise trenches with insulating material on the side walls, the trenches then being filled with polysilicon. Theis reduces bit line sheet resistance and increases the punch through voltage between adjacent bit lines.

REFERENCES:
patent: 4222062 (1980-09-01), Trotter et al.
patent: 4912535 (1990-03-01), Okumura
patent: 5017977 (1992-05-01), Richardson
patent: 5278438 (1994-01-01), Kim et al.

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