Bumping process to increase bump height and to create a more...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Ball or nail head type contact – lead – or bond

Reexamination Certificate

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C438S737000, C438S738000, C438S779000

Reexamination Certificate

active

06956292

ABSTRACT:
A new process is provided which is an extension and improvement of present processing for the creation of a solder bump. After the layers of Under Bump Metal and a layer of solder metal have been created in patterned and etched format and overlying the contact pad, following a conventional processing sequence, a layer of polyimide is deposited. The solder flow is performed using the thickness of the deposited layer of polyimide to control the height of the column underneath the reflown solder.

REFERENCES:
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patent: 5597737 (1997-01-01), Greer et al.
patent: 5903058 (1999-05-01), Akram
patent: 5904156 (1999-05-01), Advocate, Jr. et al.
patent: 5914274 (1999-06-01), Yamaguchi et al.
patent: 6211052 (2001-04-01), Farnworth
patent: 6451681 (2002-09-01), Greer
patent: 6528881 (2003-03-01), Tsuboi
patent: 6620720 (2003-09-01), Moyer et al.

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