Bulk plasma generation

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating

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31511121, 31511171, 31323131, 250427, H05H 102

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active

050516590

ABSTRACT:
Annular arrangements of thermionic filaments adjacent opposite axial ends a chamber within which argon gas at low presure is confined, generate steady state plasma with uniformity by low energy emission of gas ionizing electrons from the filaments. The ionizing electrons and plasma generated are axially confined between grids at the axial ends of the chamber and radially confined by a low intensity magnetic field generated by an external magnetic coil.

REFERENCES:
patent: 4447732 (1984-05-01), Leung et al.
patent: 4661710 (1987-04-01), Verney et al.
patent: 4742232 (1988-05-01), Biddle et al.
patent: 4767931 (1988-08-01), Sato et al.
patent: 4857809 (1989-08-01), Torii et al.

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