Bulk acoustic wave resonator, filter and duplexer and...

Details Bulk acoustic wave resonator, filter and duplexer and... Bulk acoustic wave resonator, filter and duplexer and...

2005-04-05

2009-11-24

Benson, Walter (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S348000

Reexamination Certificate

active

07622846

ABSTRACT:
A resonator having a membrane formed of a piezoelectric layer sandwiched between first and second electrode is suspended above a cavity formed from the back surface of the support structure. In one embodiment, the cavity walls are substantially perpendicular to the back surface. In another embodiment, the first electrode is formed in the cavity such that it is electrically connected to an electrode on the back surface of the support structure. In yet another embodiment, the cavity is formed via an etch through via holes in the back surface of the support structure, which leads to greater flexibility in designing a method of manufacture while reducing the need for alignment relative to other designs.

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