Bubbler for solid metal-organic percursors

Details Bubbler for solid metal-organic percursors Bubbler for solid metal-organic percursors

1995-09-29

1997-02-18

Sollecito, John M.

Drying and gas or vapor contact with solids

Apparatus

With fluid current conveying of treated material

34591, F26B 1700

Patent

active

056031696

ABSTRACT:
A bubbler for solid metal-organic precursors is described. The bubbler includes a bubbler body, a carrier gas feed tube, an exhaust tube, a compressing plate and a pair of porous thin plates. A carrier gas is fed into a mass of metal-organic precursors through a feed tube which is connected with the bottom of the bubbler body. The exhaust tube is set away from the mass of metal-organic precursors and drains the carrier gas passing through the precursors. The compressing plate has many holes and is movable up and down along the wall of the bubbler body so that it may be positioned according to the amount of the precursors. The upper porous thin plate is located between the exhaust tube and the compressing plate, and the lower porous thin plate is located above the leading end of the feed tube, giving support to the mass of the metal-organic precursors. That is, the precursors are placed on the lower porous thin plate and there is a room between the lower porous thin plate and the bottom of the bubbler body.

REFERENCES:
patent: 3308558 (1967-03-01), Orlando
patent: 3866332 (1975-02-01), Hertz
patent: 5343633 (1994-09-01), Wang et al.

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