Bubble suppressing flow controller with ultrasonic flow meter

Details Bubble suppressing flow controller with ultrasonic flow meter Bubble suppressing flow controller with ultrasonic flow meter

2007-11-20

2007-11-20

Morgan, Eileen P. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

Computer controlled

Reexamination Certificate

active

11292839

ABSTRACT:
A method and apparatus for the delivery of slurry solution comprising an ultrasonic flow meter positioned between a fluid preparation manifold and a slurry delivery arm, and a shutoff valve positioned between a proportional valve and the slurry delivery arm. Also, a method and apparatus for the delivery of slurry solution including an ultrasonic flow meter positioned to receive fluid from a fluid preparation manifold, a proportional valve and stepper motor in communication with the flow meter, and a reverse flow restrictor in communication with the proportional valve and a slurry delivery arm.

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