Brush scrubbing-high frequency resonating substrate...

Details Brush scrubbing-high frequency resonating substrate... Brush scrubbing-high frequency resonating substrate...

2006-04-25

2006-04-25

Crispino, Richard (Department: 1744)

Brushing, scrubbing, and general cleaning

Machines

Wiping

C015S077000, C015S088200

Reexamination Certificate

active

07032269

ABSTRACT:
A substrate processing system is provided. The substrate processing system comprises a brush assembly that includes a core, a transducer, and a brush. The core is configured to include a plurality of orifices extending from a center of the brush core to an outer surface of the brush core. The transducer is configured to be disposed on an outer surface of the core. The transducer is capable of resonating at a high frequency. The brush includes a plurality of openings, and is configured to cover the transducer. When the transducer resonates at the high frequency, high energy acoustic energy is imparted from the transducer to a surface of a substrate to be prepared at a respective location of each opening of the plurality of openings.

REFERENCES:
patent: 5975094 (1999-11-01), Shurtliff
patent: 6175983 (2001-01-01), Hirose et al.
patent: 6464796 (2002-10-01), Vail et al.
patent: 2002/0092544 (2002-07-01), Namba

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