Brush drive assembly in a substrate processing brush box

Details Brush drive assembly in a substrate processing brush box Brush drive assembly in a substrate processing brush box

2005-02-08

2005-02-08

Spisich, Mark (Department: 1744)

Brushing, scrubbing, and general cleaning

Machines

Brushing

C015S088300, C015S102000

Reexamination Certificate

active

06851151

ABSTRACT:
A modular brush drive assembly used in a brush box for processing a substrate is provided. The modular brush drive assembly includes a pair of brush drives. Each of the pair of brush drives has a mandrel capable of receiving a brush for processing a substrate, a mandrel support arm, and a brush drive housing configured to receive the mandrel and the mandrel support arm. The brush drive housing is configured to pivot. A brush drive position control assembly is further provided and includes a pair of interlocking brush angle gears which interconnect with brush drive shafts. A positioning control is coupled to one of the interlocking brush angle gears to cause pivoting of each brush drive housing. Component parts are designed to be configurable to a plurality of orientations and implementations.

REFERENCES:
patent: 4208760 (1980-06-01), Dexter et al.
patent: 6070284 (2000-06-01), Garcia et al.
patent: 6254688 (2001-07-01), Kobayashi et al.
patent: 6427566 (2002-08-01), Jones et al.

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