Brush box cleaner module with force control

Details Brush box cleaner module with force control Brush box cleaner module with force control

2011-06-21

2011-06-21

Barr, Michael (Department: 1711)

Brushing, scrubbing, and general cleaning

Machines

Brushing

C015S077000

Reexamination Certificate

active

07962990

ABSTRACT:
Embodiments of the present invention relates to an apparatus and method for cleaning a substrate using scrubber brushes. One embodiment of the present invention provides a substrate cleaner comprises two scrubber brush assemblies movably disposed in a processing volume. The two scrubber brush assemblies are configured to contact and clean opposite surfaces of a substrate disposed in the processing volume. The substrate cleaner also comprises a positioning assembly configured to simultaneously adjust positions of the two scrubber brush assemblies, wherein the positioning assembly makes substantially the same amount of adjustment to the first and second scrubber brush assemblies in mirror symmetry.

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International Search Report and Written Opinion dated Mar. 31, 2010 for International Application No. PCT/US2009/056686.

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