Broadband spectroscopic rotating compensator ellipsometer

Optics: measuring and testing – By polarized light examination – Of surface reflection

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356364, 250225, G01J 400, G02F 101

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059737875

ABSTRACT:
An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135.degree. to 225.degree., and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

REFERENCES:
patent: 3985447 (1976-10-01), Aspnes
patent: 4053323 (1977-10-01), Dill et al.
patent: 4492466 (1985-01-01), Aspnes
patent: 4905170 (1990-02-01), Forouhi et al.
patent: 4931132 (1990-06-01), Aspnes et al.
patent: 5018863 (1991-05-01), Vareille et al.
patent: 5042951 (1991-08-01), Gold et al.
patent: 5091320 (1992-02-01), Aspnes et al.
patent: 5181080 (1993-01-01), Fanton et al.
patent: 5277747 (1994-01-01), Aspnes
patent: 5329357 (1994-07-01), Bernoux et al.
patent: 5333052 (1994-07-01), Finarov
patent: 5371586 (1994-12-01), Chau
patent: 5373359 (1994-12-01), Woollam et al.
patent: 5412473 (1995-05-01), Rosencwaig et al.
patent: 5521705 (1996-05-01), Oldenbourg et al.
patent: 5521706 (1996-05-01), Green et al.
patent: 5666201 (1997-09-01), Johs et al.
patent: 5706212 (1998-01-01), Thompson et al.
patent: 5757494 (1998-05-01), Green et al.
patent: 5872630 (1999-02-01), Johs et al.
A. Ambirajan et al., "Optimum Angles For A Polarimeter: Part I", Optical Engineering, vol. 34 No. 6, pp. 1651-1655, Jun. 1995.
A. Ambirajan et al., Optimum Angles For A Polarimeter: Part II, Optical Engineering, vol. 34 No. 6, pp. 1656-1658, Jun. 1995.
I. An et al., "Simultaneous Real Time Spectroscopic Ellipsometry And Reflectance For Monitoring Semiconductor And Thin Film Preparation", Materials Research Society Symposium Proc., vol. 34, pp. 33-38, 1994.
I. Appenzeller, "A New Polarimeter For Faint Astronomical Objects", Yerkes Observatory, Univ. of Chicago, pp. 136-139, Jan. 1967.
D.E. Aspnes, "Alignment Of An Optically Active Biplate Compensator", Applied Optics, vol. 10, pp. 2545-2546, Nov. 1971.
D.E. Aspnes et al. "High Precision Scanning Ellipsometer", Applied Optics, vol. 14, pp. 220-228, Jan. 1975.
D.E. Aspnes et al. "Photomultiplier Linearization And System Stabilization For Photometric Ellipsometers And Polarimeters", SPIE, vol. 112-Optical Polarimetry, pp. 62-66, 1977.
D.K. Burge et al., "Effect Of A Thin Surface Film On The Ellipsometric Determination of Optical Constants", Journal of the Optical Society of America, vol. 54, No. 12, pp. 1428-1433, Dec. 1964.
B.D. Cahan, "Implications Of Three Parameter Solutions To The Three-Layer Model", Surface Science, vol. 56, pp. 354-372, 1976.
D. Clarke et al., "Polarized Light And Optical Measurement", Chapter 4 and bibliography, Pergamon Press Ltd., Oxford, pp. 118-154 and 179-182, 1971.
D. Clarke et al., "A Three-Channel Astronomical Photoelectric Spectropolarimeter", Journal of Scientific Instruments (Journal of Physics E), Series 2, vol. 1, pp. 409-412, 1968.
W. Duncan et al., "Insitu Spectral Ellipsometry For Real-Time Measurement And Control", Applied Surface Science, vol. 63, pp. 9-16, 1993.
T. Gehrels (ed.), "Planets, Stars And Nebulae Studied With Photopolarimetry", University of Arizona Press, pp. 135-175, 1974.
A. Hamnett et al., "An Ellipsometric Study Of Polypyrrole Films On Platinum", J. Electroanal Chem., vol. 270, pp. 479-488, 1989.
P.S. Hauge, "Generalized Rotating-Compensator Ellipsometry", Surface Science, vol. 56, pp. 148-160, 1976.
P.S. Hauge, "Recent Developments In Instrumentation In Ellipsometry", Surface Science, vol. 96, pp. 108-140, 1980.
P.S. Hauge et al., "A Rotating-Compensator Fourier Ellipsometer", Engineering Technology, 5 pages, Mar., 1975.
E.B. Hodgdon, "Theory, Design, And Calibration Of A UV Spectrophotopolarimeter", Applied Optics, vol. 4, No. 11, pp. 1479-1483, Nov. 1965.
Y.T. Kim et al., "Fast Scanning Spectroelectrochemical Ellipsometry: In-Situ Characterization of Gold Oxide", Surface Science, vol. 233, pp. 341-350, 1990.
Aspnes, D.E. & Hauge P.S., "Rotating-Compensator/Analyzer Fixed-Analyzer Ellipsometer: Analysis and Comparison To Other Automatic Ellipsometers", J. Opt. Soc. Am., vol. 66, No. 9, Sep. 1976, pp. 949-954.
Den Boer, J.H.W.G. et al., "Spectroscopic Rotating Compensator Ellipsometry In The Infrared: Retarder Design and Measurement", Meas. Sci. Technol., vol. 8, Jan. 20, 1997, pp. 484-492.
English language copy of Search Report from a foreign patent office, issued in a counterpart application.
H.W. Nguyen et al., "Evolution Of The Optical Functions Of Thin-Film Aluminum: A Real-Time Spectroscopic Ellipsometry Study", American Physical Society, Physical Review B, vol. 47, No. 7, pp. 3947-3965, Feb. 1993.
W. Paik et al., "Exact Ellipsometric Measurement Of Thickness And Optical Properties Of A Thin Light-Absorbing Film Without Auxiliary Measurements", Surface Science, vol. 28, pp. 61-68, 1971.
Z. Sekera, "Recent Developments In The Study Of The Polarization Of Sky Light", Advances In Geophysics, vol. 3, pp. 43-104, 1956.
Aspnes, et al., Rotatig-Compensator/Analyzer Fixed Analyzer Ellipsometer: Analysis and Comparison To Other Automatic Ellipsomesters, Journal Of Optical Society of America, vol. 66, No. 9, pp. 949-954, Sep. 1976.
U.S. application No. 08/327,315, Jeff T. Fanton, filed Oct. 21, 1994.

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