Broadband ellipsometer or polarimeter system including at...

Details Broadband ellipsometer or polarimeter system including at... Broadband ellipsometer or polarimeter system including at...

2007-05-08

2007-05-08

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

C250S557000, C356S364000, C356S445000, C356S300000

Reexamination Certificate

active

11103229

ABSTRACT:
Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a tubular mounting fixture, and the application thereof in focusing, (and optionally re-colliminating), a spectroscopic electromagnetic beam into a very small, chromatically relatively undispersed, area spot on a material system.

REFERENCES:
patent: 2700918 (1955-02-01), Osterberg
patent: 3183763 (1965-05-01), Koestes
patent: 4053232 (1977-10-01), Dill et al.
patent: 4105338 (1978-08-01), Kuroha
patent: 4210401 (1980-07-01), Batten
patent: 4332476 (1982-06-01), Stenberg et al.
patent: 4355903 (1982-10-01), Sandercock
patent: 4556292 (1985-12-01), Mathyssek et al.
patent: 4636075 (1987-01-01), Knollenberg
patent: 4647207 (1987-03-01), Bjork et al.
patent: 4668860 (1987-05-01), Anthon
patent: 4671657 (1987-06-01), Calvani et al.
patent: 4750822 (1988-06-01), Rosencwaig et al.
patent: 4893932 (1990-01-01), Knollenberg
patent: 5042951 (1991-08-01), Gold et al.
patent: 5166752 (1992-11-01), Spanier et al.
patent: 5329357 (1994-07-01), Bernoux et al.
patent: 5333052 (1994-07-01), Finarov
patent: 5343293 (1994-08-01), Berger et al.
patent: 5349471 (1994-09-01), Morris
patent: 5373359 (1994-12-01), Woollam et al.
patent: 5475525 (1995-12-01), Tournois et al.
patent: 5504582 (1996-04-01), Johs et al.
patent: 5521706 (1996-05-01), Green et al.
patent: 5581350 (1996-12-01), Chen et al.
patent: 5582646 (1996-12-01), Woollam
patent: 5596406 (1997-01-01), Rosencwaig et al.
patent: 5608526 (1997-03-01), Piwonka-Corle et al.
patent: 5666201 (1997-09-01), Johs et al.
patent: 5706212 (1998-01-01), Thompson et al.
patent: 5757494 (1998-05-01), Green et al.
patent: 5793480 (1998-08-01), Lacy et al.
patent: 5798837 (1998-08-01), Aspnes et al.
patent: 5872630 (1999-02-01), Johs et al.
patent: 5877859 (1999-03-01), Aspnes
patent: 5917594 (1999-06-01), Norton
patent: 5946098 (1999-08-01), Johs et al.
patent: 5956145 (1999-09-01), Green et al.
patent: 5963325 (1999-10-01), Johs et al.
patent: 5963327 (1999-10-01), He et al.
patent: 6084674 (2000-07-01), Johs et al.
patent: 6084675 (2000-07-01), Herzinger et al.
patent: 6100981 (2000-08-01), Johs et al.
patent: 6118537 (2000-09-01), Johs et al.
patent: 6141102 (2000-10-01), Johs et al.
patent: 6268917 (2001-07-01), Johs
patent: 6587282 (2003-07-01), Wang et al.
patent: 6804004 (2004-10-01), Johs et al.
patent: 6822738 (2004-11-01), Johs et al.
patent: 6829049 (2004-12-01), Uhrich et al.
patent: 2002/0024669 (2002-02-01), Danner et al.
patent: 1518728 (1989-10-01), None
patent: WO 91/14157 (1991-09-01), None
patent: WO 92/12404 (1992-07-01), None
patent: WO 96/18205 (1996-06-01), None
patent: WO 99/02950 (1999-01-01), None
EP1 172 642 A2 by Danner et al Japan 2002 2098591 A1 by Danner et al.
Japan 2002 2098591 A1 by Danner et al.

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