Optics: measuring and testing – Infrared and ultraviolet
Reexamination Certificate
2010-09-07
2011-11-08
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
Infrared and ultraviolet
C356S445000, C356S328000, C250S372000, C250S339030, C250S297000
Reexamination Certificate
active
08054453
ABSTRACT:
A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.
REFERENCES:
patent: 3091154 (1963-05-01), Hall
patent: 3160752 (1964-12-01), Bennett
patent: 3572951 (1971-03-01), Rothwarf et al.
patent: 3751643 (1973-08-01), Dill et al.
patent: 3825347 (1974-07-01), Kaiser
patent: 4029419 (1977-06-01), Schumann et al.
patent: 4040750 (1977-08-01), Zwiener
patent: 4368983 (1983-01-01), Bennett
patent: 4645349 (1987-02-01), Tabata
patent: 4729657 (1988-03-01), Cooper et al.
patent: 4837603 (1989-06-01), Hayashi
patent: 4899055 (1990-02-01), Adams
patent: 4984894 (1991-01-01), Kondo
patent: 5042949 (1991-08-01), Greenberg et al.
patent: 5045704 (1991-09-01), Coates
patent: 5120966 (1992-06-01), Kondo
patent: 5128549 (1992-07-01), Kaya
patent: 5182618 (1993-01-01), Heinonen
patent: 5241366 (1993-08-01), Bevis et al.
patent: 5251006 (1993-10-01), Honigs et al.
patent: 5357448 (1994-10-01), Stanford
patent: RE34783 (1994-11-01), Coates
patent: 5388909 (1995-02-01), Johnson et al.
patent: 5440141 (1995-08-01), Horie
patent: 5452091 (1995-09-01), Johnson
patent: 5486701 (1996-01-01), Norton et al.
patent: 5493401 (1996-02-01), Horie et al.
patent: 5581350 (1996-12-01), Chen et al.
patent: 5607800 (1997-03-01), Ziger
patent: 5608526 (1997-03-01), Piwonka-Corle et al.
patent: 5686993 (1997-11-01), Kokubo et al.
patent: 5747813 (1998-05-01), Norton et al.
patent: 5754296 (1998-05-01), Law
patent: 5771094 (1998-06-01), Carter
patent: 5777733 (1998-07-01), Radziuk
patent: 5781304 (1998-07-01), Kotidis et al.
patent: 5784167 (1998-07-01), Ho
patent: 5798837 (1998-08-01), Aspnes et al.
patent: 5805285 (1998-09-01), Johs et al.
patent: 5867276 (1999-02-01), McNeil et al.
patent: 5880831 (1999-03-01), Buermann et al.
patent: 5900939 (1999-05-01), Aspnes et al.
patent: 5903351 (1999-05-01), Jeong et al.
patent: 5917594 (1999-06-01), Norton
patent: 5991022 (1999-11-01), Buermann et al.
patent: 6052401 (2000-04-01), Wieser et al.
patent: 6091485 (2000-07-01), Li et al.
patent: 6122052 (2000-09-01), Barnes et al.
patent: 6128085 (2000-10-01), Buermann et al.
patent: 6129807 (2000-10-01), Grimbergen et al.
patent: 6181427 (2001-01-01), Yarussi et al.
patent: 6184529 (2001-02-01), Contini
patent: 6184984 (2001-02-01), Lee et al.
patent: 6226086 (2001-05-01), Holbrook et al.
patent: 6261853 (2001-07-01), Howell et al.
patent: 6265033 (2001-07-01), Hilliard
patent: 6275292 (2001-08-01), Thakur et al.
patent: 6278519 (2001-08-01), Rosencwaig et al.
patent: 6297880 (2001-10-01), Rosencwaig et al.
patent: 6304326 (2001-10-01), Aspnes et al.
patent: 6313466 (2001-11-01), Olsen et al.
patent: 6361646 (2002-03-01), Bibby, Jr. et al.
patent: 6392756 (2002-05-01), Li et al.
patent: 6411385 (2002-06-01), Aspnes et al.
patent: 6414302 (2002-07-01), Freeouf
patent: 6417921 (2002-07-01), Rosencwaig et al.
patent: 6433878 (2002-08-01), Niu et al.
patent: 6453006 (2002-09-01), Koppel
patent: 6485872 (2002-11-01), Rosenthal et al.
patent: 6525829 (2003-02-01), Powell et al.
patent: 6549279 (2003-04-01), Adams et al.
patent: 6556303 (2003-04-01), Rangarajan et al.
patent: 6572951 (2003-06-01), Hasegawa et al.
patent: 6580510 (2003-06-01), Nawracala
patent: 6590656 (2003-07-01), Xu et al.
patent: 6608690 (2003-08-01), Niu et al.
patent: 6630673 (2003-10-01), Khalil et al.
patent: 6630996 (2003-10-01), Rao et al.
patent: 6633831 (2003-10-01), Nikoonahad et al.
patent: 6643354 (2003-11-01), Koppel et al.
patent: 6657737 (2003-12-01), Kimba et al.
patent: 6665075 (2003-12-01), Mittleman et al.
patent: 6673637 (2004-01-01), Wack et al.
patent: 6710865 (2004-03-01), Forouhi et al.
patent: 6713775 (2004-03-01), Chelvayohan et al.
patent: 6721052 (2004-04-01), Zhao et al.
patent: 6734968 (2004-05-01), Wang et al.
patent: 6765676 (2004-07-01), Buermann
patent: 6768785 (2004-07-01), Koppel
patent: 6801309 (2004-10-01), Nelson
patent: 6806951 (2004-10-01), Wack et al.
patent: 6879395 (2005-04-01), Oka et al.
patent: 6891626 (2005-05-01), Niu et al.
patent: 6897456 (2005-05-01), Hasegawa et al.
patent: 6897807 (2005-05-01), Kishigami et al.
patent: 6917419 (2005-07-01), Fielden et al.
patent: 6919957 (2005-07-01), Nikoonahad et al.
patent: 6934025 (2005-08-01), Opsal et al.
patent: 6979578 (2005-12-01), Venugopal
patent: 6982792 (2006-01-01), Woollam et al.
patent: 6987832 (2006-01-01), Koppel et al.
patent: 7006235 (2006-02-01), Levy et al.
patent: 7026165 (2006-04-01), DeGrandpre
patent: 7026626 (2006-04-01), Harrison
patent: 7061614 (2006-06-01), Wang et al.
patent: 7067818 (2006-06-01), Harrison
patent: 7072050 (2006-07-01), Kimba et al.
patent: 7095511 (2006-08-01), Chalmers et al.
patent: 7126131 (2006-10-01), Harrison
patent: 7130029 (2006-10-01), Wack et al.
patent: 7189973 (2007-03-01), Harrison
patent: 7196785 (2007-03-01), Nishiyama et al.
patent: 7224471 (2007-05-01), Bischoff et al.
patent: 7242477 (2007-07-01), Mieher et al.
patent: 7271394 (2007-09-01), Harrison
patent: 7282703 (2007-10-01), Walsh et al.
patent: 7342235 (2008-03-01), Harrison et al.
patent: 7391030 (2008-06-01), Harrison
patent: 7394551 (2008-07-01), Harrison
patent: 7399975 (2008-07-01), Harrison
patent: 7446876 (2008-11-01), Harrison
patent: 7485869 (2009-02-01), Harrison et al.
patent: 7511265 (2009-03-01), Walsh et al.
patent: 7579601 (2009-08-01), Harrison et al.
patent: 7643666 (2010-01-01), Setija et al.
patent: 7684037 (2010-03-01), Harrison
patent: 2001/0055118 (2001-12-01), Nawracala
patent: 2002/0030826 (2002-03-01), Chalmers et al.
patent: 2002/0088952 (2002-07-01), Rao et al.
patent: 2002/0126277 (2002-09-01), Norton et al.
patent: 2002/0149774 (2002-10-01), McAninch
patent: 2002/0154302 (2002-10-01), Rosencwaig et al.
patent: 2002/0190207 (2002-12-01), Levy et al.
patent: 2003/0071996 (2003-04-01), Wang et al.
patent: 2003/0081201 (2003-05-01), Shibata et al.
patent: 2004/0150820 (2004-08-01), Nikoonahad et al.
patent: 2005/0036143 (2005-02-01), Huang
patent: 2006/0001885 (2006-01-01), Hertzsch et al.
patent: 2007/0181793 (2007-08-01), Harrison
patent: 2007/0215801 (2007-09-01), Walsh et al.
patent: 2008/0073560 (2008-03-01), Harrison et al.
patent: 2008/0129986 (2008-06-01), Walsh
patent: 2008/0181793 (2008-07-01), Mistry et al.
patent: 2008/0246951 (2008-10-01), Walsh et al.
patent: 2009/0002711 (2009-01-01), Harrison
patent: 2009/0248074 (2009-10-01), Kliegman et al.
patent: 2010/0051822 (2010-03-01), Harrison
patent: 2430682 (2001-05-01), None
patent: 10160572 (1998-06-01), None
patent: 2003202266 (2003-07-01), None
patent: 2003232681 (2003-08-01), None
patent: 9902970 (1999-01-01), None
patent: 2007126612 (2007-11-01), None
patent: 2007130295 (2007-11-01), None
U.S. Appl. No. 12/590,151 Official Action dated Mar. 17, 2011.
U.S. Appl. No. 12/834,939 Official Action dated Jun. 10, 2011.
Das et al., “Image Evaluation of the High-Resolution VUV Spectrometer at SURF II by Ray Tracing”, Journal of Research of the National Institute of Standards and Technology, vol. 103, No. 5, pp. 483-495, Sep.-Oct. 1998.
US Re-Examination # 90/009,409 Official Action dated Jun. 18, 2010.
Chinese Patent Application No. 200480027513 6 Official Action d
Akanbi Isiaka
Chowdhury Tarifur
D. Kligler I.P. Services Ltd.
Jordan Valley Semiconductors Ltd.
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