Bottom antireflective coatings

Details Bottom antireflective coatings Bottom antireflective coatings

2006-04-18

2006-04-18

Schilling, Richard L. (Department: 1752)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

C526S262000, C526S304000, C525S123000, C525S326700, C525S326800, C525S327100, C525S328200, C540S525000, C546S142000, C546S183000, C546S237000, C546S296000, C544S175000, C548S479000, C548S547000, C564S158000, C564S159000, C564S162000

Reexamination Certificate

active

07030201

ABSTRACT:
The present invention relates to bottom antireflective coating compositions and polymers useful in making such compositions.

REFERENCES:
patent: 4079041 (1978-03-01), Baumann et al.
patent: 4247660 (1981-01-01), Zweifel et al.
patent: 4532332 (1985-07-01), Muller
patent: 5424364 (1995-06-01), Simms et al.
patent: 5919599 (1999-07-01), Meador et al.
patent: 6156479 (2000-12-01), Meador et al.
patent: 6369249 (2002-04-01), Lele et al.
patent: 6730763 (2004-05-01), Okazaki et al.
patent: 2002/0156148 (2002-10-01), Arase et al.
patent: 2003/0004283 (2003-01-01), Puligadda et al.
patent: 0 922 715 (1999-06-01), None
English language abstract of JP37009212, published 19620725.
Notification of Transmittal of International Search Report and the Written Opinion of the International Searching Authority (Form PCT/ISA/220) for PCT/IB2004/004412.
International Search Report (Form PCT/ISA/210) for PCT/IB2004/004412.
Written Opinion of the International Search Authority (Form PCT/ISA/237) for PCT/IB2004/004412.

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