Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2008-01-29
2008-01-29
Schilling, Richard L. (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S325000, C430S326000, C430S910000, C428S413000, C428S414000, C560S079000, C560S080000, C560S081000, C560S084000, C560S085000, C560S095000
Reexamination Certificate
active
07323289
ABSTRACT:
Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.
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Chemcat Abstract, AN 2002:2742256, Catalog: Interchim Intermediates, Jul. 9, 2002.
http://matse1.mse.uiuc.edu/˜tw/polymers/glos.html.
Bhave Mandar
Fowler Michelle
Neef Charles J.
Windsor Michelle
Brewer Science Inc.
Hovey & Williams, LLP
Schilling Richard L.
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